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DIN EN 62047-8:2011-12

Semiconductor devices - Micro-electromechanical devices - Part 8: Strip bending test method for tensile property measurement of thin films (IEC 62047-8:2011); German version EN 62047-8:2011

Summary

This document specifies the strip bending test method to measure tensile properties of thin films with high accuracy, repeatability, moderate effort of alignment and handling compared to the conventional tensile test. This testing method is valid for test pieces with a thickness between 50 nm and several µm, and with an aspect ratio (ratio of length to thickness) of more than 300.

Technical characteristics

Publisher Deutsche Institut für Normung e.V. (DIN)
Publication Date 12/01/2011
Page Count 20
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