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DIN EN ISO 14644-13:2017-11
Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications (ISO 14644-13:2017); German version EN ISO 14644-13:2017
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Summary
This draft standard addresses the cleaning to a specified degree on cleanroom surfaces, surfaces of equipment in a cleanroom and surfaces of materials in a cleanroom. It provides guidance on the assessment of cleaning methods for achieving the required surface cleanliness by particle concentration and surface cleanliness by chemical concentration classes and which techniques should be considered to achieve these specified levels.
Technical characteristics
| Publisher | Deutsche Institut für Normung e.V. (DIN) |
| Publication Date | 11/01/2017 |
| Page Count | 44 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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Previous versions
01/03/2016
Superseded
Historical