DIN EN ISO 14644-14:2017-01
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DIN EN ISO 14644-14:2017-01

Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration (ISO 14644-14:2016); German version EN ISO 14644-14:2016
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Summary

This part of ISO 14644 specifies a methodology to assess the suitability of equipment (e. g. machinery, measuring equipment, process equipment, components, tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO 14644-1. Particle sizes range from 0,1 µm to equal to or larger than 5 µm (given in ISO 14644-1).

Technical characteristics

Publisher Deutsche Institut für Normung e.V. (DIN)
Publication Date 01/01/2017
Page Count 30
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