DIN EN ISO 14644-15:2018-03

This standard provides requirements and guidance for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemical concentration (ISO 14644-8). Health and safety requirements are not covered by this document and may be covered by legal documents of the specific country. The following issues are excluded: - compatibility with cleaning agents and techniques; - cleanability; - biocontamination; - specific requirements of equipment and materials for processes and products; - design details of equipment.