DIN EN ISO 14644-3:2006-03

This standard specifies metrology and test methods for characterizing the performance of cleanrooms (with unidirectional or non-unidirectional flow) and clean zones in three possible occupancy states (as-built, at-rest and operational). The test methods recommend test equipment requirements and testing procedures for determining performance parameters. Where the test method is affected by the type of cleanroom, alternative procedures are defined. For some tests, several different methods and instruments are recommended.The test methods also may be used or adopted for requalification or for periodic monitoring of the performance. Measurements on products or processes in cleanrooms are not considered.