DIN EN ISO 14644-5:2005-03
Superseded , Under review Standard
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DIN EN ISO 14644-5:2005-03

Cleanrooms and associated controlled environments - Part 5: Operations (ISO 14644-5:2004); German version EN ISO 14644-5:2004
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Draft standard

Summary

This part of International Standard ISO 14644 specifies basic requirements for operating cleanrooms and associated controlled environments to meet their levels for cleanliness. This cleanroom standard does not specify levels of cleanliness nor the methods or means for attaining the desired level. However, annexes provide further guidance. It is intended for those planning to use and operate a cleanroom.

Technical characteristics

Publisher Deutsche Institut für Normung e.V. (DIN)
Publication Date 03/01/2005
Page Count 52
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Weight (in grams) ---
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