DIN EN ISO 14644-9:2012-12

This part of ISO 14644 describes the classification of the particle contamination levels on solid surfaces in cleanrooms and associated controlled environment applications. Recommendations on testing and measuring methods as well as information about surface characteristics are given in informative annexes. This part of ISO 14644 applies to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices. The surface particle cleanliness (SPC) classification is limited to particles between 0,05 µm and 500 µm. The following issues are not considered in this standard: - requirements on the cleanliness and suitability of surfaces for specific processes; - procedures for the cleaning of surfaces; - material characteristics; - other characteristics of particles such as electrostatic charge, ionic charges, biological state and others. This part of ISO 14644 covers the classification system of surface particle contamination but does not reference the interactive bonding forces or generation processes that are usually time-dependent (such as deposition, sedimentation, aging) and process-dependent (such as transportation or handling). Measurement methods of the classification should be adapted for surface characteristics (such as porosity, roughness, electrostatic charge, surface energy.). The surface cleanliness depends upon material and design characteristics, stress loads (complexity of loads acting on a surface) and prevailing environmental conditions, along with other factors. Due to the complexity of statistical evaluations and available bibliography, the selection and use of statistical methods for classification and testing are not described in this part of ISO 14644.