Superseded , Under review Standard
Historical

DIN EN ISO 25178-604:2013-12

Geometrical product specification (GPS) - Surface texture: Areal - Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments (ISO 25178-604:2013); German version EN ISO 25178-604:2013

Summary

This part of ISO 25178-604 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.

Technical characteristics

Publisher Deutsche Institut für Normung e.V. (DIN)
Publication Date 12/01/2013
Page Count 44
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