Superseded
Draft standard
Historical
DIN IEC 62047-1:2003-10
Semiconductor devices - Part 1: Microelectromechanical devices; Terms and definitions (IEC 47/1695A/CD:2003)
Preview
Summary
Halbleiterbauelemente - Teil 1: Bauteile der Mikrosystemtechnik; Begriffe und Definitionen (IEC 47/1695A/CD:2003)
Technical characteristics
| Publisher | Deutsche Institut für Normung e.V. (DIN) |
| Publication Date | 10/01/2003 |
| Page Count | 8 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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Previous versions
01/10/2003
Superseded
Historical