Superseded
Draft standard
Historical
DIN IEC 62622:2011-07
Nanotechnologies - Description, measurement, and dimensional quality parameters of artificial gratings (IEC 113/102/CD:2011)
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Summary
This document specifies generic terminology for the global and local quality parameters of artificial gratings, interpreted in terms of deviations from nominal positions of grating features, and provides guidance on categorisation of measurement and evaluation methods for their determination.
Technical characteristics
| Publisher | Deutsche Institut für Normung e.V. (DIN) |
| Publication Date | 07/01/2011 |
| Cancellation Date | 09/01/2014 |
| Page Count | 60 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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