DIN IEC/TS 62622*DIN SPEC 42622:2014-09
Withdrawn Standard
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DIN IEC/TS 62622*DIN SPEC 42622:2014-09

Nanotechnologies - Description, measurement and dimensional quality parameters of artificial gratings (IEC/TS 62622:2012)

Summary

This technical specification specifies the generic terminology for the global and local quality parameters of artificial gratings, interpreted in terms of deviations from nominal positions of grating features, and provides guidance on the categorization of measurement and evaluation methods for their determination.

Technical characteristics

Publisher Deutsche Institut für Normung e.V. (DIN)
Publication Date 09/01/2014
Page Count 38
EAN ---
ISBN ---
Weight (in grams) ---
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