DIN ISO 15632:2015-05

This Standard defines the most important quantities that characterize an energy-dispersive X ray spectrometer consisting of a semiconductor detector, a pre-amplifier and a signal-processing unit as the essential parts. This Standard is only applicable to spectrometers with semiconductor detectors operating on the principle of solid-state ionization. This Standard specifies minimum requirements and how relevant instrumental performance parameters are to be checked for such spectrometers attached to a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA). The procedure used for the actual analysis is outlined in ISO 22309 and ASTM E1508.