DIN SPEC 1994:2017-02
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DIN SPEC 1994:2017-02

Testing of materials for semiconductor technology - Determination of anions in weak acids

Summary

This document specifies a method for the determination of the anions chloride, sulfate, nitrate and phosphate in hydrofluoric acid, ammonium fluoride solution and mixtures thereof and in acetic acid in the range of 10 ng/g to 1000 ng/g.

Technical characteristics

Publisher Deutsche Institut für Normung e.V. (DIN)
Publication Date 02/01/2017
Page Count 11
EAN ---
ISBN ---
Weight (in grams) ---
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