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IEC 62047-1:2016

IEC 62047-1:2016 Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions

Summary

IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices. This edition includes the following significant technical changes with respect to the previous edition:
a) removal of ten terms;
b) revision of twelve terms;
c) addition of sixteen new terms.

Technical characteristics

Publisher International Electrotechnical Commission (IEC)
Publication Date 01/06/2016
Edition 2.0
Page Count 66
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