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IEC 62047-11:2013
IEC 62047-11:2013 Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems
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Summary
IEC 62047-11:2013 specifies the test method to measure the linear thermal expansion coefficients (CLTE) of thin free-standing solid (metallic, ceramic, polymeric, etc.) micro-electro-mechanical system (MEMS) materials with length between 0,1 mm and 1 mm and width between 10 micrometre and 1 mm and thickness between 0,1 micrometre and 1 mm, which are main structural materials used for MEMS, micromachines and others. This test method is applicable for the CLTE measurement in the temperature range from room temperature to 30 % of a material's melting temperature.
Technical characteristics
| Publisher | International Electrotechnical Commission (IEC) |
| Publication Date | 07/17/2013 |
| Edition | 1.0 |
| Page Count | 38 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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