IEC 62047-21:2014
Active Standard
Most Recent

IEC 62047-21:2014

IEC 62047-21:2014 Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials

Summary

IEC 62047-21:2014 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 µm.

Technical characteristics

Publisher International Electrotechnical Commission (IEC)
Publication Date 06/19/2014
Edition 1.0
Page Count 26
EAN ---
ISBN ---
Weight (in grams) ---
No products.

Previous versions

Contact us