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IEC 62374-1:2010

IEC 62374-1:2010 Semiconductor devices - Part 1: Time-dependent dielectric breakdown (TDDB) test for inter-metal layers

Summary

IEC 62374-1:2010 describes a test method, test structure and lifetime estimation method of the time-dependent dielectric breakdown (TDDB) test for inter-metal layers applied in semiconductor devices.

Technical characteristics

Publisher International Electrotechnical Commission (IEC)
Publication Date 09/29/2010
Edition 1.0
Page Count 32
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