ISO 13424:2013 (R2021)
Active , Reaffirmed Standard
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ISO 13424:2013 (R2021)

Surface chemical analysis — X-ray photoelectron spectroscopy — Reporting of results of thin-film analysis

Summary

ISO 13424:2013 specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical composition and thickness of homogeneous thin films, and measurement of the chemical composition as a function of depth of inhomogeneous thin films by angle-resolved XPS, XPS sputter-depth profiling, peak-shape analysis, and variable photon energy XPS.

Notes

90.93 : Norme internationale confirmée

Technical characteristics

Publisher International Organization for Standardization (ISO)
Publication Date 09/23/2013
Confirmation Date 06/17/2021
Edition 1
Page Count 46
EAN ---
ISBN ---
Weight (in grams) ---
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