ISO 16700:2016 (R2023)
Active , Reaffirmed Standard
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ISO 16700:2016 (R2023)

Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification

Summary

ISO 16700:2016 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. It does not apply to the dedicated critical dimension measurement SEM.

Notes

90.93 : Norme internationale confirmée

Technical characteristics

Publisher International Organization for Standardization (ISO)
Publication Date 07/18/2016
Confirmation Date 11/23/2023
Edition 2
Page Count 18
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ISBN ---
Weight (in grams) ---
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