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ISO 18115-3:2022
Surface chemical analysis — Vocabulary
Part 3: Terms used in optical interface analysis
Part 3: Terms used in optical interface analysis
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Summary
This document defines terms for surface chemical analysis in the area of optical interface analysis including ellipsometry, Raman spectroscopy and nonlinear optical techniques as well as general optical terms.
Notes
60.60 : Norme internationale publiée
Technical characteristics
| Publisher | International Organization for Standardization (ISO) |
| Publication Date | 06/30/2022 |
| Edition | 1 |
| Page Count | 35 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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30/06/2022
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