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ISO 19606:2024
Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for surface roughness of fine ceramic films by atomic force microscopy
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Summary
This document specifies a method to evaluate the adequateness of a probe tip for fine-ceramic thin-film surface roughness measurements by atomic force microscopy. This method applies to surfaces with an arithmetical mean roughness, Ra, in the range of about 1 nm to 30 nm and a mean width of roughness profile elements, Rsm, in the range of about 0,04 µm to 2,5 µm.
Notes
40.60 : Clôture du vote
Technical characteristics
| Publisher | International Organization for Standardization (ISO) |
| Publication Date | 11/01/2024 |
| Edition | 2 |
| Page Count | 24 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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