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ISO 20341:2003 (R2025)
Surface chemical analysis — Secondary-ion mass spectrometry — Method for estimating depth resolution parameters with multiple delta-layer reference materials
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Summary
ISO 20341:2003 specifies procedures for estimating three depth resolution parameters, viz the leading-edge decay length, the trailing-edge decay length and the Gaussian broadening, in SIMS depth profiling using multiple delta-layer reference materials. It is not applicable to delta-layers where the chemical and physical state of the near-surface region, modified by the incident primary ions, is not in the steady state.
Notes
90.20 : Norme internationale en cours d'examen systématique
Technical characteristics
| Publisher | International Organization for Standardization (ISO) |
| Publication Date | 07/24/2003 |
| Confirmation Date | 07/15/2025 |
| Edition | 1 |
| Page Count | 5 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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