ISO 21360-6:2023
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ISO 21360-6:2023

Vacuum technology — Standard methods for measuring vacuum-pump performance
Part 6: Cryogenic vacuum pumps

Summary

This document specifies methods for measuring the volume flow rate, maximum throughput, pumping capacity, base pressure cryogenic vacuum pump, cooldown time and crossover value of cryogenic vacuum pumps. It is applicable to two-stage, closed-loop gaseous helium cryogenic vacuum pumps, which can be directly flanged to a vacuum chamber.

Notes

60.60 : Norme internationale publiée

Technical characteristics

Publisher International Organization for Standardization (ISO)
Publication Date 12/06/2023
Edition 1
Page Count 12
EAN ---
ISBN ---
Weight (in grams) ---
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