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ISO 25178-604:2025
Geometrical product specifications (GPS) — Surface texture: Areal
Part 604: Design and characteristics of non-contact (coherence scanning interferometry) instruments
Part 604: Design and characteristics of non-contact (coherence scanning interferometry) instruments
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Summary
This document specifies the design and metrological characteristics of coherence scanning interferometry (CSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from surface topography data, the methods described in this document are also applicable to profiling measurements.
Notes
40.60 : Clôture du vote
Technical characteristics
| Publisher | International Organization for Standardization (ISO) |
| Publication Date | 02/14/2025 |
| Edition | 2 |
| Page Count | 23 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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