ISO 3530:1979 (R2021)
Active , Reaffirmed Standard
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ISO 3530:1979 (R2021)

Vacuum technology — Mass-spectrometer-type leak-detector calibration

Summary

Only leak detectors are described which have an integral high vacuum system to maintain the sensing element of the mass spectrometer at a low pressure. Two procedures are outlined, one to determine the minimum detectable leak rate and the other for determination of the minimum detectable concentration ratio.

Notes

90.93 : Norme internationale confirmée

Technical characteristics

Publisher International Organization for Standardization (ISO)
Publication Date 09/01/1979
Confirmation Date 11/12/2021
Edition 1
Page Count 10
EAN ---
ISBN ---
Weight (in grams) ---
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