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ISO/DIS 25164:2026
Physical vapor deposition coatings — Magnetron sputtering deposition of TiAlSiN thin films — Specification
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Summary
This document specifies the technical requirements for TiAlSiN thin films deposited by magnetron sputtering.
Notes
40.00 : DIS enregistré
Technical characteristics
| Publisher | International Organization for Standardization (ISO) |
| Publication Date | 01/26/2026 |
| Edition | 1 |
| Page Count | 7 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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