ISO/TR 15969:2001 (R2018)
Superseded , Reaffirmed Standard
Historical

ISO/TR 15969:2001 (R2018)

Surface chemical analysis — Depth profiling — Measurement of sputtered depth
Most recent standard

Summary

This Technical Report gives guidelines for measuring the sputtered depth in sputtered depth profiling. The methods of sputtered depth measurement described in this Technical Report are applicable to techniques of surface chemical analysis when used in combination with ion bombardment for the removal of a part of a solid sample to a typical sputtered depth of up to severalmicrometres.

Notes

95.99 : Annulation de la Norme internationale

Technical characteristics

Publisher International Organization for Standardization (ISO)
Publication Date 05/31/2001
Confirmation Date 09/14/2018
Edition 1
Page Count 12
EAN ---
ISBN ---
Weight (in grams) ---
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