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ISO/TS 22933:2022
Surface chemical analysis — Secondary ion mass spectrometry — Method for the measurement of mass resolution in SIMS
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Summary
This document specifies a method for measuring the mass resolution in SIMS, and how to compare the mass resolution between different instruments (e.g. TOF-SIMS, Magnetic SIMS, Quadrupole SIMS, Fourier Transform SIMS, etc.) by considering the peak shapes.
Notes
60.60 : Norme internationale publiée
Technical characteristics
| Publisher | International Organization for Standardization (ISO) |
| Publication Date | 04/01/2022 |
| Edition | 1 |
| Page Count | 15 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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