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NBN EN ISO 25178-604:2025

Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Design and characteristics of non-contact (coherence scanning interferometry) instruments (ISO 25178-604:2025)

Summary

This document specifies the design and metrological characteristics of coherence scanning interferometry (CSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from surface topography data, the methods described in this document are also applicable to profiling measurements.

Technical characteristics

Publisher Bureau de Normalisation Belge (NBN)
Publication Date 02/27/2025
Page Count 0
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