Active
Standard
Most Recent
NBN ISO 21859:2021
Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment
Preview
Summary
This document specifies a test method for plasma resistance of ceramic components in semiconductor
manufacturing equipment. It is applicable to ceramic components of plasma-resistant components in
dry etching chambers used in semiconductor manufacturing.
manufacturing equipment. It is applicable to ceramic components of plasma-resistant components in
dry etching chambers used in semiconductor manufacturing.
Technical characteristics
| Publisher | Bureau de Normalisation Belge (NBN) |
| Publication Date | 05/26/2021 |
| Page Count | 12 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
No products.