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NBN ISO 23131:2021
Ellipsometry — Principles
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Summary
This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR
spectral range as well as layer thicknesses in the field of at-line production control, quality assurance
and material development through accredited test laboratories.
It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results
conforms to ISO/IEC Guide 98-3.
spectral range as well as layer thicknesses in the field of at-line production control, quality assurance
and material development through accredited test laboratories.
It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results
conforms to ISO/IEC Guide 98-3.
Technical characteristics
| Publisher | Bureau de Normalisation Belge (NBN) |
| Publication Date | 09/21/2021 |
| Page Count | 13 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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