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NBN ISO 23216:2021
Carbon based films — Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry
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Summary
This document specifies spectroscopic ellipsometry for the determination of optical properties
(refractive index n and extinction coefficient k) and the optical classification of different types of
amorphous carbon films within the n-k plane.
It is applicable to amorphous carbon films deposited by ionized evaporation, sputtering, arc deposition,
plasma-assisted chemical vapour deposition, hot filament techniques and others.
It does not apply to carbon films modified with metals or silicon, amorphous carbon films that have a
gradient of composition/property in the thickness, paints and varnishes.
(refractive index n and extinction coefficient k) and the optical classification of different types of
amorphous carbon films within the n-k plane.
It is applicable to amorphous carbon films deposited by ionized evaporation, sputtering, arc deposition,
plasma-assisted chemical vapour deposition, hot filament techniques and others.
It does not apply to carbon films modified with metals or silicon, amorphous carbon films that have a
gradient of composition/property in the thickness, paints and varnishes.
Technical characteristics
| Publisher | Bureau de Normalisation Belge (NBN) |
| Publication Date | 09/21/2021 |
| Page Count | 16 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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