Active
Specification
Most Recent
PD ISO/TR 16268:2009
Surface chemical analysis. Proposed procedure for certifying the retained areic dose in a working reference material produced by ion implantation
Preview
Summary
Control samples;Substrates (insulating);Chemical analysis and testing;Surface chemistry;Surfaces;Ions;Measurement;Silicon;Certification (approval)
Technical characteristics
| Publisher | British Standards Institution (BSI) |
| Publication Date | 11/30/2009 |
| Page Count | 30 |
| Themes | Certification (approval) |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
No products.