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PD ISO/TR 19319:2013
Surface chemical analysis. Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods
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Summary
Auger electron spectroscopy;Surface chemistry;Electron emission;Photoelectron spectroscopy;Chemical analysis and testing;Spectroscopy;Resolution;Area;Surfaces;Chemical composition;X-ray photoelectron spectroscopy
Technical characteristics
| Publisher | British Standards Institution (BSI) |
| Publication Date | 03/31/2013 |
| Page Count | 126 |
| Themes | X-ray photoelectron spectroscopy |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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