Superseded
, Reaffirmed
Standard
Historical
VDI 2083 Blatt 10:1998-02 (R2004)
Cleanroom technology - High-Purity/Ultra-High-Purity (HP-/UHP-)media supply systems.
Summary
Reinraumtechnik - Reinstmedien-Versorgungssysteme / Achtung: Bestätigt 2004-01
Notes
Approved 2004-01
Technical characteristics
| Publisher | Verein Deutscher Ingenieure e.V. (VDI) |
| Publication Date | 02/01/1998 |
| Confirmation Date | 01/01/2004 |
| Cancellation Date | 10/01/2015 |
| Page Count | 26 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
Replaces
01/10/1995
Superseded
Historical
Previous versions
01/02/1998
Superseded
, Reaffirmed
Historical
01/10/1995
Superseded
Historical