Superseded Standard
Historical

ASTM E673-02

Standard Terminology Relating to Surface Analysis

Summary

1.1 This terminology is related to the various disciplines involved in surface analysis.

1.2 The definitions listed apply to (a) Auger electron spectroscopy (AES), (b) X-ray photoelectron spectroscopy (XPS), (c) ion-scattering spectroscopy (ISS), (d) secondary ion mass spectrometry (SIMS), and (e) energetic ion analysis (EIA).

Technical characteristics

Publisher American Society for Testing and Materials (ASTM International)
Publication Date 07/10/2002
Collection
Page Count 10
Themes Properties of surfaces
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