Superseded
Standard
Historical
BS ISO 16413:2013
Evaluation of thickness, density and interface width of thin films by X-ray reflectometry. Instrumental requirements, alignment and positioning, data collection, data analysis and reporting
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Summary
X-ray apparatus;X-ray analysis;Instruments;Density measurement;X-rays;Thickness measurement
Technical characteristics
| Publisher | British Standards Institution (BSI) |
| Publication Date | 03/31/2013 |
| Cancellation Date | 08/18/2020 |
| Page Count | 42 |
| Themes | Thickness measurement |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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