Superseded Draft standard
Historical

DIN 32564-1:2003-06

Production equipment for micro-systems - Terms and definitions - Part 1: General terms of micro-system technology

Summary

Fertigungsmittel für Mikrosysteme - Begriffe - Teil 1: Allgemeine Begriffe der Mikrosystemtechnik

Technical characteristics

Publisher Deutsche Institut für Normung e.V. (DIN)
Publication Date 06/01/2003
Page Count 8
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Weight (in grams) ---
No products.