Superseded
Draft standard
Historical
DIN 32564-1:2003-06
Production equipment for micro-systems - Terms and definitions - Part 1: General terms of micro-system technology
Summary
Fertigungsmittel für Mikrosysteme - Begriffe - Teil 1: Allgemeine Begriffe der Mikrosystemtechnik
Technical characteristics
| Publisher | Deutsche Institut für Normung e.V. (DIN) |
| Publication Date | 06/01/2003 |
| Page Count | 8 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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