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DIN 32564-1:2004-05

Production equipment for micro-systems - Terms and definitions - Part 1: General terms of micro-system technology

Summary

This document defines general terms, which relate to the production of micro-systems. Its purpose is to ease the communication about technical issues by harmonization of the vocabulary.

Technical characteristics

Publisher Deutsche Institut für Normung e.V. (DIN)
Publication Date 05/01/2004
Page Count 6
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