Active
Standard
Most Recent
DIN 32564-1:2004-05
Production equipment for micro-systems - Terms and definitions - Part 1: General terms of micro-system technology
Summary
This document defines general terms, which relate to the production of micro-systems. Its purpose is to ease the communication about technical issues by harmonization of the vocabulary.
Technical characteristics
| Publisher | Deutsche Institut für Normung e.V. (DIN) |
| Publication Date | 05/01/2004 |
| Page Count | 6 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
No products.