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Draft standard
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DIN 32567-1:2014-11
Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 1: Qualitative estimation of the material and procedure specific influences
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Summary
This document specifies methods to measure the layer thickness and step height on the shape of inhomogeneous materials with a stylus, white light interference, phase-shifting interference and confocal microscopic measuring devices in order to determine systematic deviations of the measured layer thickness and step height due to material effects.
Technical characteristics
| Publisher | Deutsche Institut für Normung e.V. (DIN) |
| Publication Date | 11/01/2014 |
| Cancellation Date | 06/01/2015 |
| Page Count | 20 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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