DIN 32567-1:2015-06
Active Standard
Most Recent

DIN 32567-1:2015-06

Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 1: Qualitative estimation of the material and procedure specific influences

Summary

This document specifies methods to measure the layer thickness and step height on the shape of inhomogeneous materials with a stylus, white light interference, phase-shifting interference and confocal microscopic measuring devices in order to determine systematic deviations of the measured layer thickness and step height due to material effects.

Technical characteristics

Publisher Deutsche Institut für Normung e.V. (DIN)
Publication Date 06/01/2015
Page Count 19
EAN ---
ISBN ---
Weight (in grams) ---
No products.

Previous versions

Contact us