DIN 50451-2:1990-10

Superseded Standard

Historical

DIN 50451-2:1990-10

Determination of cobalt, chromium, copper, iron and nickel as impurities in hydrofluoric acid for use in semiconductor technology by plasma-induced emission spectrometry

Most recent standard

Description

Features

Life cycle

Historical

Summary

Prüfung von Materialien für die Halbleitertechnologie; Bestimmung von Metallspuren in Flüssigkeiten; Kobalt (Co), Chrom (Cr), Kupfer (Cu), Eisen (Fe) und Nickel (Ni) in Flußsäure mittels Plasma-angeregter Emissionsspektrometrie

Technical characteristics

Publisher	Deutsche Institut für Normung e.V. (DIN)
Publication Date	10/01/1990
Page Count	8
EAN	---
ISBN	---
Weight (in grams)	---

No products.

Previous versions

DIN 50451-2:2003-04

DIN 50451-2:2003-04

Essai des matériaux pour la technologie des semi-conducteurs - Dosage des éléments en traces dans les liquides - Partie 2: Calcium (Ca), cobalt (Co), chrome (Cr), cuivre (Cu), fer (Fe), nickel (Ni) et zinc (Zn) dans l'acide hydrofluorique par spectrométrie à plasma à couplage induit par haute fréquence

01/04/2003

Withdrawn

Most Recent

DIN 50451-2:2002-01

DIN 50451-2:2002-01

Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 2: Calcium (Ca), Cobolt (Co), chromium (Cr), copper (Cu), iron (Fe), nickel (Ni) and zinc (Zn) in hydrofluoric acid with plasma-induced emission spectroscopy

01/01/2002

Superseded

Historical

DIN 50451-2:1990-10

DIN 50451-2:1990-10

Determination of cobalt, chromium, copper, iron and nickel as impurities in hydrofluoric acid for use in semiconductor technology by plasma-induced emission spectrometry

01/10/1990

Superseded

Historical

Language

Format

Redline

Without Redline

With Redline