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DIN 50452-2:2009-10
Testing of materials for semiconductor technology - Test method for particle analysis in liquids - Part 2: Determination of particles by optical particle counters
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Summary
This document specifies a method for the determination of the concentration of particles by using of automatic flow measuring equipments for particles. The method is based on the laser scattered light method and allows the particle size to be measured and the measured particle to be counted in specified size ranges. This document is applicable to liquid reagents commonly used in semiconductor technology with particle sizes of 0,1 µm and greater.
Technical characteristics
| Publisher | Deutsche Institut für Normung e.V. (DIN) |
| Publication Date | 10/01/2009 |
| Page Count | 11 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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