DIN 50989-1:2017-04
Superseded Draft standard
Historical

DIN 50989-1:2017-04

Ellipsometry - Part 1: Principles; Text in German and English
Most recent standard

Summary

This standard deals with the ellipsometry, a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses, in the range of at-line production control, quality assurance and material development.

Technical characteristics

Publisher Deutsche Institut für Normung e.V. (DIN)
Publication Date 04/01/2017
Cancellation Date 03/01/2018
Page Count 37
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ISBN ---
Weight (in grams) ---
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