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ISO 25178-603:2013 (R2018)
Geometrical product specifications (GPS) — Surface texture: Areal
Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments
Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments
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Summary
ISO 25178-603:2013 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.
Notes
90.92 : Norme internationale à réviser
Technical characteristics
| Publisher | International Organization for Standardization (ISO) |
| Publication Date | 09/25/2013 |
| Confirmation Date | 12/04/2018 |
| Edition | 1 |
| Page Count | 28 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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