ISO 25178-603:2025

Geometrical product specifications (GPS) — Surface texture: Areal
Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments

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Description

Features

Life cycle

Historical

Summary

This document specifies the design and metrological characteristics of phase shifting interferometry (PSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements.

Notes

40.60 : Clôture du vote

Technical characteristics

Publisher	International Organization for Standardization (ISO)
Publication Date	02/14/2025
Edition	2
Page Count	18
EAN	---
ISBN	---
Weight (in grams)	---