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NBN ISO 19606:2021

Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for surface roughness of fine ceramic films by atomic force microscopy

Summary

This document describes a method to evaluate the adequateness of a probe tip for fine-ceramic thin-film
surface roughness measurements by atomic force microscopy, of surfaces with an arithmetical mean
roughness, Ra, in the range of about 1 nm to 30 nm and a mean width of roughness profile elements,
RSm, in the range of about 0,04 µm to 2,5 µm.

Technical characteristics

Publisher Bureau de Normalisation Belge (NBN)
Publication Date 05/26/2021
Page Count 15
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Weight (in grams) ---
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