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NBN ISO 19606:2025

Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for surface roughness of fine ceramic films by atomic force microscopy

Summary

This document specifies a method to evaluate the adequateness of a probe tip for fine-ceramic thin-film surface roughness measurements by atomic force microscopy. This method applies to surfaces with an arithmetical mean roughness, Ra, in the range of about 1 nm to 30 nm and a mean width of roughness profile elements, Rsm, in the range of about 0,04 µm to 2,5 µm.

Technical characteristics

Publisher Bureau de Normalisation Belge (NBN)
Publication Date 01/28/2025
Page Count 0
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