VDI/VDE 2656 Blatt 1:2006-12
Superseded Standard
Historical

VDI/VDE 2656 Blatt 1:2006-12

Determination of geometrical quantities by using of scanning probe microscopes - Calibration of measurement systems
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Summary

Bestimmung geometrischer Messgrößen mit Rastersondermikroskopen - Kalibrierung von Messsystemen

Technical characteristics

Publisher Verein Deutscher Ingenieure e.V. (VDI)
Publication Date 12/01/2006
Cancellation Date 06/01/2008
Page Count 47
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ISBN ---
Weight (in grams) ---
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