Superseded
, Reaffirmed
Standard
Historical
VDI/VDE 2656 Blatt 1:2008-06 (R2014)
Determination of geometrical quantities by using of Scanning Probe Microscopes - Calibration of measurement systems.
Summary
Bestimmung geometrischer Messgrößen mit Rastersondenmikroskopen - Kalibrierung von Messsystemen / Achtung: Bestätigt 2014-01
Notes
Approved 2014-01
Technical characteristics
| Publisher | Verein Deutscher Ingenieure e.V. (VDI) |
| Publication Date | 06/01/2008 |
| Confirmation Date | 01/01/2014 |
| Page Count | 82 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
Replaces
Previous versions
01/06/2008
Superseded
, Reaffirmed
Historical